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1. Identity statement
Reference TypeConference Paper (Conference Proceedings)
Sitemtc-m21c.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34R/3R3TCJE
Repositorysid.inpe.br/mtc-m21c/2018/05.07.16.50
Metadata Repositorysid.inpe.br/mtc-m21c/2018/05.07.16.50.01
Metadata Last Update2020:12.07.21.11.37 (UTC) administrator
Secondary KeyINPE--PRE/
Citation KeyBerniPaesGalv:2018:SpLiIn
TitleSpectroscopy liquid infiltration method for measuring porous silicon properties
Year2018
Access Date2024, May 18
Secondary TypePRE CN
2. Context
Author1 Berni, Luiz Angelo
2 Paes, T. F.
3 Galvão, E. C. S.
Resume Identifier1 8JMKD3MGP5W/3C9JHMN
Group1 LABAS-COCTE-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Universidade Federal da Bahia (UFBA)
3 Universidade Federal de São Paulo (UNIFESP)
Author e-Mail Address1 luiz.berni@inpe.br
Conference NameEncontro Nacional de Física da Matéria Condensada (ENFMC)
Conference LocationFoz do Iguaçu, PR
Date06-11 maio
History (UTC)2018-05-07 16:50:40 :: simone -> administrator :: 2018
2020-12-07 21:11:37 :: administrator -> simone :: 2018
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
AbstractPorous silicon can be formed by electrochemical etching in hydrofluoric acid solution. Due to the large surface area and photoluminescent properties, porous silicon has attracted the interest of several areas, such as, microelectronics, optoelectronics, chemical and biological sensors, batteries, solar cells and biomedical devices. In the laboratory, porous silicon was formed by low resistivity p-type monocrystalline silicon wafers under several conditions of current density, solution concentration and etching time [1]. In order to measure the thickness, refractive index and porosity of the porous silicon layer, it was assembled in the laboratory a system that operates with the spectroscopy liquid infiltration method. This method is non-destructive and fast execution, which enables to measure the properties of the porous layers in few minutes [2]. The method consists in measuring the reflectance of the porous silicon layer immersed in two distinct media, for example, air and alcohol. The analysis of the obtained Fabry-Perot interference spectra allows to estimate the properties of the porous layer. This work presents details of the assembled system and results obtained from several samples. The results obtained with the spectroscopy liquid infiltration method were also compared with the high-resolution scanning electron microscopy data.
AreaFISMAT
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4. Conditions of access and use
Languageen
User Groupsimone
Reader Groupadministrator
simone
Visibilityshown
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ESR3H2
Citing Item List
Host Collectionurlib.net/www/2017/11.22.19.04
6. Notes
Empty Fieldsarchivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory descriptionlevel dissemination doi e-mailaddress edition editor format isbn issn keywords label lineage mark mirrorrepository nextedition notes numberoffiles numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readpermission rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark tertiarytype type url versiontype volume
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